Nikon NEXIV FOUP CNC Video Measuring System

Nikon Updated: 2007-06-20
Nikon NEXIV FOUP CNC Video Measuring System

Provides all dimensional measurements required for wafer carrier fabrication including control of deformation due to aging of wafers and wafer carriers.

The NEXIV VM-450C - designed for use with 300mm Front Opening Unified Pod (FOUP) & Front Opening Shipping Box (FOSB) wafer carriers - detects hard to see edges using a variety of illumination features as well as Nikon's unique image processing technologies. By incorporating laser AF that provides quick non-contact focusing, even on transparent surfaces and on the edge of the peripheries of the wafer, the VM-450C is able to measure SEMI-standard dimensions with excellent accuracy.


• Four side planes of the carrier are continuously measured by rotating the kinematic plate in 90° increments

• SEMI-compliant kinematic plate provides perfect X,Y,Z coordinates

• Variety of illumination choices facilitate accurate measurements of registration pin holes and latch-key holes

• Laser AF provides fast, non-contact measurements of wafer positions

• Wide area, high-intensity LED illumination enables accurate measurements of wafer heights

• 300mm, 200mm wafer carrier and SMIF Pod base