Nikon NEXIV VMR-H3030 CNC Video Measuring System

Nikon Updated: 2007-06-20
Nikon NEXIV VMR-H3030 CNC Video Measuring System

Nikon's ultra-high precision automated video measuring system offers greater accuracy and versatility.

One of Nikon's most sophisticated automated vision systems, the NEXIV VMR-H3030 will surpass expectations no matter how complicated or simple the measuring task. It features a 300 x 300 x 150mm stage, TTL Laser height/profile scanning, intelligent pattern recognition and low contrast edge measuring. Perfect for when exceptional performance and accuracy are critical, such as dies and molds and finely machined parts.

Nikon's Most Advanced Optics
Ultrahigh precision of 0.01µm provides the critical detail necessary for a Master Calibration Instrument. The H3030 features a powerful telecentric 15:1 zoom module with 0.35 NA objective and 50mm free working distance.

Unsurpassed Edge Detection
Black and gray portions of a workpiece are digitally classified into 256 levels, then edges are detected and processed based on this classification. This prevents measurement data from being affected by changes in illumination.

When the operator clicks the point to be measured, the system automatically rotates the probes, sets them at the optimum position, and sets the probe size automatically. Desired edges are easily selected by eliminating dust and burrs through a change in the contrast threshold level. Unique algorithms enhance edge detection, even at low magnifications.

Through-the-lens (TTL) Laser Focusing System
Allows users to fully utilize the powerful optics to scan at 1,000 points per second on complex profiles of 3D precision parts and a 15X Telecentric Zoom System that facilitates easy searches at low magnifications.

Multiple Illumination Choices
A variety of illumination choices facilitate accurate edge detection in dies and molds. These include:

Automeasure Software
Features interactive measurement wizards, which can be customized by each operator for future use. Intelligent search functions eliminate possible measurement errors and a multi-pattern search function automatically corrects part-to-part variation along with deviations in expected edge or feature locations. NEXIV also features a pattern matching measurement system that determines coordinate values for features too difficult to measure in the normal geometric measuring mode.

Rugged Steel Bases
For superior stability in any environment with stage rail designs normally seen on high-end machine tools.

VMR-Z120X Maximum Magnification Model
Offers even greater precision, providing optical magnification to 120x. Ideal for wafer level CSP, wafer bump height and SIP, rerouted masks and masks for MEMS. Other features: