Nikon NWL-860 IC Inspection Wafer Loader

Nikon Updated: 2007-06-19
Nikon NWL-860 IC Inspection Wafer Loader

The perfect answer to 8- and 6- inch macro inspection tasks.

The NWL-860 series provides a full range of macro inspection capabilities — one of the features considered most essential for inspecting semiconductor patterns with progressively higher steps and ever-increasing layers. A single cassette wafer loader capable of handling 8- and 6-inch (200 and 150 mm) wafers, this series of wafer loaders not only comes standard with pattern side macro inspection capability, but also with the ability to perform back side periphery and center macro inspections as well.

Back Side Macro Inspection
Besides pattern side macro inspection, the NWL-860 series can perform back side periphery and center macro inspections. Macro inspection parameters, such as wafer rotation speed and tilt angle, can be set automatically or manually. Use the macro setting knobs to preset initial settings and make later adjustments using the joystick.

High Reliability
Should an error occur, an error message appears on the LCD panel with a wafer recovery feature. Even when the power is turned OFF, the vacuum chuck stays ON, and the wafer is automatically returned to the cassette when the power is switched ON again. For even greater safety, the SP and INX types both feature an emergency button.

Ergonomic Design
To assure operation in a natural posture, ergonomics surround every aspect of this system’s design. Operation keys and knobs are located at the front and close to the operator, so that operation requires a minimum movement of the hand or eye. The wafer cassette is set at the front and 35° to the left of the operator, enhancing cassette setting and streamlining visual wafer inspections.

Simple, Easy Operation
The NWL-860 series uses a dialog-type operating system with an LCD panel, in which display information is logically classified, allowing settings for each step to be made easily on a single screen. Sophisticated functions such as file management for cassettes and wafer samples further enhance operational ease. A dedicated input keypad for setting inspection processes and programming wafers to be checked is also available as an option.

High Throughput
Not only is the speed of the elevator surprisingly fast, but the use of a non-contact centering mechanism makes it possible to perform alignment operations quickly and accurately. A multi-arm system also allows loading and unloading of wafers with the utmost precision, increasing the overall efficiency of transfer and wafer exchange operations. This dramatically decreases cycle times, providing levels of throughput never seen before in any other system.

Communication Function (Option)
A data communication function conforming to SEMI (SECS) standards can be added optionally, enabling transfer of inspection data via the RS-232C interface or by remote control. This proves handy when expanding the system or incorporating it into a total network.