Nikon NWL860TMB-SP IC Inspection Wafer Loader

Nikon Updated: 2008-04-14 RSS
Nikon NWL860TMB-SP IC Inspection Wafer Loader

A host of top-notch features for advanced macro inspection needs

The following features are added to enhance the macro functions of the TMB series:

• Stainless-steel body generates no static electricity

• Provided with an emergency stop switch (EMO)

• Vacuum chuck unit uses PEEK plastic so that the checked wafer is hardly scratched.

• Data communication function (optional) conforming to SEMI (SECS) standards

(Photo is an example configured with the ECLIPSE L200 IC inspection microscope)