Nikon Optistation-3200 Wafer Inspection System

Nikon Updated: 2007-06-20
Nikon Optistation-3200 Wafer Inspection System

Redefining 300mm wafer inspection with Nikon’s CFI60 optical design.

One of Nikon's most advanced and versatile semiconductor inspection systems, the Optistation 3200 provides three-mode macro inspection capability — front, backside center, and backside peripheral — as well as high performance lighting techniques that allow for detection of a wide variety of process defects and particle/scratch detection.

CFI60 Optical Design
Nikon’s renowned CFI60 optics produce crisp, clear images with high contrast and minimal flare. Longer working distances throughout the magnification range ensure safer wafer inspection. The darkfield signal-to-background ratio is three times higher than in the past, ensuring significantly better imaging.

DUV Microscope
The newly designed DUV microscope module supports 90nm and future design rules.

Review Inspection with ADC
State-of-the-art image processing and analysis technology ensures accurate defect detection. The user-friendly software allows for easy setup and operation.

Flexibility in Load Port Positioning
Two load ports are available in the side or rear, making the OPTISTATION-3200 adaptable to diverse fab layouts and 300mm factory automation requirements.

3-Mode Macro Inspection with High-Performance Illuminators
Allows surface Macro, center backside Macro, and perimeter backside Macro inspections. The newly developed wide (WIL-100) and line (LIL-100) illuminators offer wavelength and lighting techniques to easily detect a variety of process defects.

Easy Operation by Touch Screen
Automated and motorized functions are controlled by an easily accessible touchscreen to ensure comfortable operation while minimizing contamination. Optimum observation settings, including aperture and light intensity, can be preset according to objective lens or wafer type.

Objectives
CFI LU Plan BD Series 5x NA 0.15 W.D. 18mm; 10x NA 0.30 W.D. 15.00mm; 20x NA 0.45 W.D. 4.50mm; 50x NA 0.80 W.D. 1.00mm; 100x NA 0.90 W.D. 1.0mm; CFI LU Plan Apo BD Series 150x NA 0.90 W.D. 0.42mm