Hitachi HD-2300A Scanning Transmission Electron Microscope

* 0.2nm resolution guaranteed
* Advanced analytical performance
* Bringing ease of use to a new level
* High sensitivity EDS analysis and high energy resolution EELS

The HD-2300A Scanning Transmission Electron Microscope was introduced in response to the need for evaluation and analysis of ultra-thin films in semiconductor applications and other complex materials. Using the latest field emission technology, the HD-2300A offers high-resolution imaging capabilities, guaranteed at better than 0.2nm, with a maximum magnification of 10,000,000x. Simplified operation and automated column alignment allows the HD-2300A to operate as simply as today's latest SEM, benefiting facilities by providing an easy to use system that can produce high end results quickly.

The HD-2300A can be equipped with an energy dispersive X-ray spectrometer, with enhanced sensitivity (solid angle > 0.3sr) to allow the quick acquisition of elemental maps/linescans and spectra. The HD-2300A holders are compatible with the FB-2100 Focused Ion Beam system, offering a comprehensive investigative system for site-specific sample preparation and analysis of challenging samples. The digital imaging system allows critical dimension measurements of key parameters directly on the image display, allowing images and data to be transferred directly to the user's network for evaluation or further processing and analysis.

System Specifications

Image Resolution: 0.2nm
Video Signal: SE signal
Z-contrast signal
Phase contrast signal
Accelerating Voltage: 200kV